Fluid control apparatus

Details Fluid control apparatus Fluid control apparatus

1996-06-28

1998-06-23

Lee, Kevin

Fluid handling

Convertible

Reversible check

137271, 137884, F16K 1122

Patent

active

057691100

ABSTRACT:
A fluid control apparatus comprises a mass flow controller, two on-off valves disposed at the inlet side of the controller and three on-off valves disposed at the outlet side of the controller. At the inlet side, a main fluid on-off valve is positioned on a purge fluid on-off valve, and at the outlet side, a vent on-off valve is positioned on a vacuum suction on-off valve, with a main passage on-off valve further positioned on the vent on-off valve.

REFERENCES:
patent: 4657048 (1987-04-01), Foster
patent: 4714091 (1987-12-01), Wagner
patent: 5603601 (1997-02-01), Winkelstroter

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