Valves and valve actuation – Electrically actuated valve – Having element dimensionally responsive to field
Patent
1990-09-12
1992-03-31
Cohan, Alan
Valves and valve actuation
Electrically actuated valve
Having element dimensionally responsive to field
137486, F16K 3102, G05D 706
Patent
active
051001004
ABSTRACT:
An improved control and shut off valve assembly is disclosed. The preferred valve assembly provides sufficient forces to overcome biasing forces so as to provide adequate shut off at a leakage rate of less than 10.sup.-9 std cc/sec of He with an atmospheric differential of Helium applied across the valve seat of the assembly, and precise control of the flow rate, all as a function of a single electrical control signal. In accordance with another aspect the valve seat is made from a material softer than the valve seat engagement means so that the seat is coined by the valve seat engagement means when first used so as to insure tight tolerances for sealing the valve passageway during the shut off mode. Finally, in accordance with yet another aspect of the invention, the valve assembly is constructed with no separate parts within the flow path so as to maintain a clean passageway.
REFERENCES:
patent: 3614486 (1971-10-01), Smiley et al.
patent: 3851526 (1974-12-01), Drexel
patent: 4464932 (1984-08-01), Ewing et al.
patent: 4548075 (1985-10-01), Marino
patent: 4695034 (1987-09-01), Shimizu et al.
patent: 4977916 (1990-12-01), Ohmi
Benson Richard A.
King Steven M.
Cohan Alan
MKS Instruments Inc.
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