Coating apparatus – Gas or vapor deposition
Reexamination Certificate
2010-11-17
2011-12-13
Zervigon, Rudy (Department: 1716)
Coating apparatus
Gas or vapor deposition
C118SDIG009, C156S345330, C156S345370
Reexamination Certificate
active
08075692
ABSTRACT:
Fluidized bed reactor systems for producing high purity silicon-coated particles are disclosed. A vessel has an outer wall, an insulation layer inwardly of the outer wall, at least one heater positioned inwardly of the insulation layer, a removable concentric liner inwardly of the heater, a central inlet nozzle, a plurality of fluidization nozzles, at least one cooling gas nozzle, and at least one product outlet. The system may include a removable concentric sleeve inwardly of the liner. In particular systems the central inlet nozzle is configured to produce a primary gas vertical plume centrally in the reactor chamber to minimize silicon deposition on reactor surfaces.
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Allen Levi C.
Ege Paul E.
Geertsen Robert J.
Osborne E. Wayne
Spangler Michael V.
Klarquist & Sparkman, LLP
Rec Silicon Inc
Zervigon Rudy
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