Fluid bearings and vacuum chucks and methods for producing same

Details Fluid bearings and vacuum chucks and methods for producing same Fluid bearings and vacuum chucks and methods for producing same

1998-02-13

1999-11-23

Breneman, Bruce

Etching a substrate: processes

Adhesive or autogenous bonding of two or more...

G06K 900

Patent

active

059894440

ABSTRACT:
Fluid bearings, vacuum chucks and methods for producing these devices. One example of a method for forming a fluid bearing includes forming a plate having a face surface and a bonding surface, coupling a first side of a body to the bonding surface, placing the face surface of the plate against a predetermined surface, and generating a pressure difference to conform the face surface to the predetermined surface. One example of a fluid bearing of the invention includes a plate support and a flexible bearing plate having a bonding surface which is attached to the plate support with an adhesive which is flexible before hardening. The flexible bearing plate conforms to a predetermined surface during a portion of the time that the adhesive hardens. Examples of vacuum chucks, and methods for forming vacuum chucks, and other aspects of the invention are described.

REFERENCES:
patent: 5572598 (1996-11-01), Whil et al.

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