Heating – Processes of heating or heater operation – Treating an article – container – batch or body as a unit
Patent
1974-03-21
1976-03-30
Camby, John J.
Heating
Processes of heating or heater operation
Treating an article, container, batch or body as a unit
165 65, 214 1BE, 302 2R, 302 29, 302 31, 432 80, 432121, F27D 300
Patent
active
039472361
ABSTRACT:
An improved apparatus and method for transferring articles, such as silicon and like wafers used in making electronic devices from one station to another at variable rates of movement utilizing a fluid bearing. The apparatus and method also provide for heat treating the wafers in a furnace through which the fluid bearing extends.
The fluid bearing track structure utilized is produced from a refractory, heat-resistant material, such as quartz or silicon carbide, and comprises an enclosed tube having fluid bearing passages through the base wall thereof in communication with fluid supply means. The track structure is operatively divided into at least two track sections positioned as linear continuations of each other.
Article receiving means for automatically feeding articles in sequence from a supply thereof and for accepting articles in sequence following completion of treatment thereof are provided at the stations between which the wafers are transferred. Such means includes automatically indexable magazines for discharging and receiving wafers in sequence.
The fluid bearing apparatus and method is constructed to rapidly accelerate slow moving or stopped wafers in sequence onto means for rapidly cooling the wafers after heat treatment so that rapid and uniform quenching may be effected and uniform results insured.
REFERENCES:
patent: 3405977 (1968-10-01), Albright
patent: 3588176 (1971-06-01), Byrne
patent: 3603646 (1971-09-01), Leoff
patent: 3614168 (1971-10-01), Range
patent: 3645581 (1972-02-01), Lasch et al.
patent: 3717381 (1973-02-01), Hagler
patent: 3718371 (1973-02-01), Lasch
patent: 3731823 (1973-05-01), Goth
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