Fluid bearing slide assembly for workpiece polishing

Details Fluid bearing slide assembly for workpiece polishing Fluid bearing slide assembly for workpiece polishing

2005-09-06

2005-09-06

Thomas, David B. (Department: 3723)

Abrading

Precision device or process - or with condition responsive...

With feeding of tool or work holder

C451S297000, C451S168000

Reexamination Certificate

active

06939203

ABSTRACT:
A fluid bearing polishing apparatus for carrying a polishing member for chemical mechanical polishing includes a fluid supply and a fluid dispensing structure to support the polishing member. A method of polishing a workpiece includes supporting a polishing member on a fluid bearing between a first end of the polishing member and a second end of the polishing member and moving the polishing member to polish the workpiece. The fluid bearing has a curved portion at which plane of travel of the polishing member changes from a first plane to a second plane. Advantages of the invention include smooth belt motion in all desired directions of movement.

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Steigerwald et al., “Pattern geometry effects in the chemical-mechanical polishing of inlaid copper structures,” Oct. 1994, pp. 2842-2848.

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