Fluid application system

Details Fluid application system Fluid application system

1975-06-13

1977-04-05

Bleutge, Robert L.

Cleaning and liquid contact with solids

Apparatus

With movable means to cause fluid motion

134200, 134201, 269296, B08B 302

Patent

active

040156150

ABSTRACT:
A fluid application system which is useful for the subjection of substantially planar objects to various fluids for cleaning, etching, photoresist developing and the like. The system includes a chamber which has at least one agitation mechanism. The agitation mechanism includes an orificed plate positioned on one side of one or more of the planar objects. Means are provided for moving the fluid through the orificed plate with a pulsating motion. The agitation mechanism can either be substantially within the chamber or form one or more of the sides of the chamber. The agitation mechanism includes in addition to the orificed plate, a pneumatic chamber, a fluid chamber, a flexible diaphragm between the pneumatic and fluid chambers, and a piston being movable within the agitation mechanism to force the fluid through the orificed plate with the pulsating motion.

REFERENCES:
patent: 1114591 (1914-10-01), De Laney
patent: 3404845 (1968-10-01), Schmeling et al.
patent: 3762426 (1973-10-01), Yakubowski
patent: 3765431 (1973-10-01), Jannett et al.
patent: 3851758 (1974-12-01), Makhijani et al.

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