Flowmeter

Details Flowmeter Flowmeter

2011-03-01

2011-03-01

Thompson, Jewel (Department: 2855)

Measuring and testing

Volume or rate of flow

Mass flow by imparting angular or transverse momentum to the...

Reexamination Certificate

active

07895905

ABSTRACT:
A flowmeter including a system chip with a silicon substrate provided on a carrier, in an opening whereof at least one silicon flow tube is provided for transporting a medium whose flow rate is to be measured, the tube having two ends that issue via a wall of the opening into channels coated with silicon nitride in the silicon substrate, wherein the flow tube forms part of a Coriolis flow sensor and/or a thermal flow sensor, and wherein the channels are preferably in communication through the carrier with connection lines to the external world.

REFERENCES:
patent: 5233213 (1993-08-01), Marek
patent: 5970790 (1999-10-01), Jouwsma et al.
patent: 6477901 (2002-11-01), Tadigadapa et al.
patent: 6615655 (2003-09-01), Sakai et al.
patent: 7340965 (2008-03-01), Mehendale et al.
patent: 2006/0037187 (2006-02-01), Sparks et al.
patent: 1 291 621 (2003-03-01), None
patent: 2007/147786 (2007-12-01), None
Search Report dated Jul. 30, 2008, from corresponding Dutch application.
Peter Enoksson et al., “A Silicon Resonant Sensor Structure for Coriolis Mass-Flow Measurements”, Journal of Microelectromechanical Systems, vol. 6, No. 2, Jun. 1997, XP011034742, ISSN 1057-7157, pp. 119-125.

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