Coating processes – With post-treatment of coating or coating material – Heating or drying
Patent
1997-01-09
1999-01-05
Talbot, Brian K.
Coating processes
With post-treatment of coating or coating material
Heating or drying
427387, 427 58, 438562, 438918, B05D 302
Patent
active
058559620
ABSTRACT:
A spin on insulating coating with ionic barrier properties is formed on a substrate, by mixing a P or B containing material such as phosphazene or borazine with a solution of silsesquioxane, spin coating on a substrate to form a film of pre-determined thickness. The coated film is cured in a step wise manner to drive out the solvents and most of the H and OH groups, with the resulting film having a composition SiONX, where X can be B, P, F and mixtures thereof. The amount of P, B or other elements are predetermined by calculating the solids in the silsesquioxane and adding suitable amount of borazine or phosphazene. The coated and cured film fills and planarizes any topography on the substrate created by etching trenches, forming gate stacks or metal lines. In one of the variation, the substrate has a layer of insulating material disposed thereon prior to the application of the spin-on insulator.
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Cote Donna Rizzone
Nguyen Son Van
International Business Machines - Corporation
Srikrishnan Kris V.
Talbot Brian K.
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