Flow verification system and flow verification method

Details Flow verification system and flow verification method Flow verification system and flow verification method

2011-03-08

2011-03-08

Dunn, Drew A (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system in a specific environment

Mechanical measurement system

C702S045000, C073S851000

Reexamination Certificate

active

07904257

ABSTRACT:
A flow verification system is adapted to verify flow characteristics just after a flow control device starts flow control by verifying a flow rate in a gas piping system which includes a first cutoff valve, the flow control device installed downstream from the first cutoff valve, and a pressure sensor for measuring pressure downstream from the flow control device, flow verification is made based on the pressure measured by the pressure sensor. The flow verification system also includes a benchmark storage device for storing a benchmark which is calculated by integrating the pressure values measured by the pressure sensor during a normal flow control operation, and an abnormality detection device for detecting an abnormal flow of process gas.

REFERENCES:
patent: 2008/0223455 (2008-09-01), Fukuhara et al.
patent: 2009/0019943 (2009-01-01), Ozawa et al.
patent: B2 3367811 (2002-11-01), None

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