Measuring and testing – Volume or rate of flow – Thermal type
Patent
1989-08-15
1990-08-14
Goldstein, Herbert
Measuring and testing
Volume or rate of flow
Thermal type
G01F 168
Patent
active
049476882
ABSTRACT:
A flow velocity sensor comprises a base, a first elongating member extending above the base and defined with a first edge at a downstream end thereof, a first heating device provided on the first elongating member along the first edge, a first heat detector provided on the first elongating member in a vicinity of the first heating device at a side away from the first edge and comprising a first metal oxide which absorbs oxygen when heated, desorbs oxygen when cooled, and changes resistivity responsive to adsorption and desorption of oxygen, a second elongating member extending above the base at a downstream side of the first elongating member and having a second edge at an upstream end thereof such that the second edge is substantially aligned with the first edge in a flow direction, a second heating device provided on the second elongating member along the second edge, and a second heat detector provided on the second elongating member in a vicinity of the second heating device at a side away from the second heating means and comprising a second metal oxide which absorbs oxygen when cooled, desorbs oxygen when heated, and changes resistivity responsive to adsorption and desorption of oxygen.
REFERENCES:
patent: 4343768 (1982-08-01), Kimura
patent: 4624137 (1986-11-01), Johnson et al.
patent: 4696188 (1987-09-01), Higashi
Ohta Wasaburo
Yagawara Shinji
Goldstein Herbert
Ricoh & Company, Ltd.
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