Flow sensor with metal film resistor

Details Flow sensor with metal film resistor Flow sensor with metal film resistor

2009-01-27

2009-11-24

Thompson, Jewel (Department: 2855)

Measuring and testing

Volume or rate of flow

Thermal type

Reexamination Certificate

active

07621180

ABSTRACT:
There is a need for providing a flow sensor with metal film resistor that improves detection sensitivity using a metal film for a resistance heat detector and a resistance temperature detector. The flow sensor with metal film resistor is structured to form a resistance heat detector, a resistance temperature detector for resistance heat detector for measuring temperature of the resistance heat detector, an upstream resistance temperature detector, a downstream resistance temperature detector, and an air resistance temperature detector on a silicon substrate. Plural floating-island insulators are provided for the resistance heat detector and within wiring thereof.

REFERENCES:
patent: 5313832 (1994-05-01), Stephan et al.
patent: 5763775 (1998-06-01), Sato et al.
patent: 6118166 (2000-09-01), Shoji et al.
patent: 6615655 (2003-09-01), Sakai et al.
patent: 6626037 (2003-09-01), Wado et al.
patent: 6644113 (2003-11-01), Kawai et al.
patent: 2007/0056366 (2007-03-01), Sakuma et al.
patent: 2008/0168650 (2008-07-01), Sakuma
patent: 10-213470 (1997-01-01), None
patent: 11-287687 (1998-04-01), None
patent: 2007-071737 (2005-09-01), None
patent: 2008-170382 (2007-01-01), None

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