Measuring and testing – Volume or rate of flow – Thermal type
Reexamination Certificate
2008-07-29
2008-07-29
Patel, Harshad (Department: 2855)
Measuring and testing
Volume or rate of flow
Thermal type
Reexamination Certificate
active
11330969
ABSTRACT:
The present invention provides a technology capable of achieving a highly-sensitive flow sensor, by forming a metal film having a relatively high TCR on a semiconductor substrate via an insulating film. A measurement device which is a thermal fluid flow sensor includes a heat element, resistance temperature detectors (upstream-side resistance temperature detector and downstream-side resistance temperature detector), and a resistance temperature detector for air which are all formed of a first metal film. The first metal film is formed of an α-Ta film having a resistivity lower than three times the resistivity of a Ta ingot and obtained by deposition through sputtering on an amorphous film containing metal.
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European Search Report dated Feb. 13, 2007.
Fukuda Hiroshi
Sakuma Noriyuki
Takeda Ken'ichi
Yamamoto Naoki
A. Marquez, Esq. Juan Carlos
Fisher Esq. Stanley P.
Hitachi , Ltd.
Patel Harshad
Reed Smith LLP
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