Flow sensor on insulator

Details Flow sensor on insulator Flow sensor on insulator

1986-05-01

1988-05-17

Goldstein, Herbert

Measuring and testing

Volume or rate of flow

Thermal type

G01F 168

Patent

active

047442468

ABSTRACT:
A flow sensor on a thermally insulating substrate is provided with improved thermal conductance and ruggedness to hostile environments. The flow sensor includes a pn junction temperature sensing element on the substrate, a layer of dielectric material, which provides electric isolation and physical protection, covering the pn junction element, and a thin film heating element covering the dielectric layer and being in close thermal contact with the pn junction element.

REFERENCES:
patent: 1996943 (1935-04-01), Wile
patent: 3802264 (1974-04-01), Poppendiek et al.
patent: 4283944 (1981-08-01), Gruner et al.
patent: 4399697 (1983-08-01), Kohama et al.
patent: 4478077 (1984-10-01), Bohrer et al.
patent: 4587843 (1986-05-01), Tokura et al.

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