Flow sensor having first and second temperature detecting portio

Details Flow sensor having first and second temperature detecting portio Flow sensor having first and second temperature detecting portio

1997-03-12

1998-06-09

Dombroske, George M.

Measuring and testing

Volume or rate of flow

Thermal type

G01F 168

Patent

active

057637750

ABSTRACT:
A flow sensor eliminates turbulence of fluid flow due to a structure of the temperature detecting portion so that a temperature of the temperature detecting portions does not fluctuate due to the turbulence of the fluid. The flow sensor is formed on a substrate. Each of a first temperature detecting portion and a second temperature detecting portion has a heating function and a temperature detecting function, and are arranged along a direction of flow of the fluid. A supporting portion is formed on the substrate for supporting the first and second temperature detecting portions thereon. The supporting portion does not have a side surface facing substantially in the direction of flow of the fluid. A side surface of the supporting portion is protected by a guard portion formed along the side surface.

REFERENCES:
patent: 5392647 (1995-02-01), Manaka
patent: 5423212 (1995-06-01), Manaka
patent: 5452610 (1995-09-01), Kleinhans et al.

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