Measuring and testing – Volume or rate of flow – Thermal type
Patent
1996-09-09
1998-09-08
Dougherty, Elizabeth L.
Measuring and testing
Volume or rate of flow
Thermal type
732025, G01F 168
Patent
active
058047204
ABSTRACT:
The bridge-like thin film sensor 5 is frangible as thin and bridge-like form suspended over the hollow 3. In case that a pieces of dust hits it, it is often broken.
In view of the foregoing drawbacks in the background flow sensor, one object of the present invention to provide a novel flow sensor which hard to break by a pieces of dust.
In accordance with the present invention, this object of the present invention is attained by a novel flow sensor which includes a substrate installed in the fluid path; a hollow formed on a surface of the substrate; a thin film sensor portion suspended over the hollow; and a guard portion near of the hollow; wherein the width of seid sensor portion is formed being not destructed by a pieces pieces of dust having the about same width of said sensor portion when the pieces of dust collides with said sensor portion.
REFERENCES:
patent: 4478076 (1984-10-01), Bohrer
patent: 4478077 (1984-10-01), Bohrer
patent: 4501144 (1985-02-01), Higashi et al.
patent: 4581928 (1986-04-01), Johnson
patent: 4624137 (1986-11-01), Johnson et al.
patent: 4682503 (1987-07-01), Higashi et al.
patent: 4696188 (1987-09-01), Higashi
patent: 4739657 (1988-04-01), Higashi et al.
patent: 4914947 (1990-04-01), Davidson
patent: 5050429 (1991-09-01), Nishimoto et al.
patent: 5291781 (1994-03-01), Nagata et al.
patent: 5313832 (1994-05-01), Stephan et al.
patent: 5392647 (1995-02-01), Manaka
patent: 5452610 (1995-09-01), Kleinhans et al.
patent: 5464966 (1995-11-01), Gaitan et al.
patent: 5467649 (1995-11-01), Reihlen et al.
Mitsuteru Kimura
Morimasa Kaminishi
Amrozowicz Paul D.
Dougherty Elizabeth L.
Ricoh & Company, Ltd.
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