Measuring and testing – Volume or rate of flow – Thermal type
Reexamination Certificate
2006-01-03
2006-01-03
Noori, Max (Department: 2855)
Measuring and testing
Volume or rate of flow
Thermal type
Reexamination Certificate
active
06981410
ABSTRACT:
A flow sensor includes a substrate, an electrical insulating film, and a flow velocity detection mechanism. In the substrate, a diaphragm portion having a first surface in contact with a measurement target fluid and a thick fixing portion surrounding the diaphragm portion are integrally formed. The electrical insulating film is formed on a second surface of the diaphragm portion which is on a side opposite to the first surface. The flow velocity detection mechanism is arranged on the electrical insulating film. A method of manufacturing a flow sensor is also disclosed.
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Ike Shinichi
Kamiunten Shoji
Nakano Seishi
Nakata Tarou
Seki Koji
Blakely & Sokoloff, Taylor & Zafman
Noori Max
Thompson Jewel V.
Yamatake Corporation
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