Measuring and testing – Volume or rate of flow – Thermal type
Patent
1991-03-15
1993-04-13
Goldstein, Herbert
Measuring and testing
Volume or rate of flow
Thermal type
E01F 168
Patent
active
052012212
ABSTRACT:
A hot-wire mass air flow sensor includes integral, elongated silicon members with a silicon dioxide coating on which temperature sensitive resistors are deposited. The air flow sensor has an extremely low thermal conductivity material base on which is mounted one or more of the elongate silicon members. This structure maximizes the thermal impedance of the conductive path existing at the ends of the flow sensor resistors and minimizes sensor errors. A method for fabricating the air flow sensor is also provided.
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Bomback John L.
Forgacs Robert L.
McCarthy Shaun L.
Abolins Peter
Ford Motor Company
Goldstein Herbert
May Roger L.
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