Flow sensor

Details Flow sensor Flow sensor

2007-03-06

2007-03-06

Thompson, Jewel (Department: 2855)

Measuring and testing

Volume or rate of flow

Proportional

Reexamination Certificate

active

10570672

ABSTRACT:
In a flow sensor (1) including an anticorrosion metallic diaphragm; an insulating film formed on one surface of the metallic diaphragm; and a flow rate measuring sensor formed on the insulating film, the other surface of the metallic diaphragm being in contact with a fluid under measure, between the insulating film (122) on which sensor devices (25) are formed and the metallic diaphragm, a buffer layer (121) having an intermediate linear expansion coefficient between the linear expansion coefficient of the insulating film (122) and the linear expansion coefficient of an anticorrosion metal is interposed. Thereby, the sensitivity and response of the flow sensor are improved, and also the heat resistance is improved, by which the flow sensor is made especially suitable for measuring the flow rate of a corrosive fluid.

REFERENCES:
patent: 4203128 (1980-05-01), Guckel et al.
patent: 6003380 (1999-12-01), Sasaki et al.
patent: 6655216 (2003-12-01), Aizawa
patent: 5-142009 (1993-06-01), None
patent: 2002-14070 (2002-01-01), None
patent: 2003-240618 (2003-08-01), None

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