Measuring and testing – Volume or rate of flow – Thermal type
Reexamination Certificate
2006-05-09
2006-05-09
Lefkowitz, Edward (Department: 2855)
Measuring and testing
Volume or rate of flow
Thermal type
Reexamination Certificate
active
07040160
ABSTRACT:
A flow sensor is described, in particular for analysis of gas flows, having a substrate and at least one sensor component which is sensitive to a flow of a medium, the sensor component being separated from the substrate in at least some areas by a region that is a poor heat conductor compared to the substrate. In addition, the region having poor heat conductivity is a porous silicon region or a porous silicon oxide region, or the region having poor heat conductivity is a recess in the surface of the substrate above which the sensor element (15) is situated on at least one web which bridges the recess and is at least mostly unsupported. The flow sensor described here is particularly suitable for angle-dependent detection of a gas flow.
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Artmann Hans
Konzelmann Uwe
Pannek Thorsten
Kenyon & Kenyon
Lefkowitz Edward
Robert & Bosch GmbH
Thompson Jewel
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