Measuring and testing – Volume or rate of flow – Thermal type
Patent
1982-09-30
1984-10-23
Goldstein, Herbert
Measuring and testing
Volume or rate of flow
Thermal type
338318, 357 55, G01F 168
Patent
active
044780770
ABSTRACT:
A flow sensor comprising a pair of thin film heat sensors and a thin film heater is disclosed. The flow sensor further comprises a semiconductor body with a depression therein and structure connecting the heater and the sensors to the body and bridging the depression so that at least a major portion of the heater and the sensors are out of contact with the body. The sensors are disposed on opposite sides of the heater, the structure connecting comprising two thin film members bridging the depression, each member comprising one sensor and a portion of the heater.
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Bohrer Philip J.
Johnson Robert G.
Goldstein Herbert
Honeywell Inc.
Sumner John P.
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