Measuring and testing – Volume or rate of flow – Thermal type
Patent
1993-03-17
1995-04-18
Goldstein, Herbert
Measuring and testing
Volume or rate of flow
Thermal type
G01F 168
Patent
active
054068410
ABSTRACT:
A flow sensor is disclosed, which has a thin film heater which is formed atop a cavity formed in the substrate, and the thin film heater is formed on its upstream and downstream sides with slits for separating it and temperature sensors from the substrate. The slits have such a small width that a laminar flow of gas can be maintained. In the case where the film heater has a positive resistance temperature coefficient, the thin film heater is disposed such that current flows in a direction of the gas stream, in case when the film heater has a negative temperature coefficient, the thin film heater is disposed such that current flows in a direction perpendicular to the gas stream.
REFERENCES:
patent: 4542650 (1985-09-01), Renken et al.
patent: 4651564 (1987-03-01), Johnson et al.
Goldstein Herbert
Ricoh Seiki Company, Ltd.
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