Fluid handling – Line condition change responsive valves – Pilot or servo controlled
Reexamination Certificate
2005-02-24
2008-10-07
Lee, Kevin L (Department: 3753)
Fluid handling
Line condition change responsive valves
Pilot or servo controlled
C251S127000, C138S040000, C138S042000, C073S861520
Reexamination Certificate
active
07431045
ABSTRACT:
A flow restrictor with a first disk having at least one inlet and at least one outlet and a flow path and a second disk having no flow path. The first disk and the second disk being stacked together. A mass flow controller comprising with an input, an output, a flow path, a pressure transducer and the above flow restrictor.
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Davis Christopher
Miller Virginia
Miyoshi Kimura
Mudd Daniel T.
White William W.
Horiba Stec, Co., Ltd.
Lee Kevin L
Sughrue & Mion, PLLC
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