Flow regulator adaptable for use with process-chamber air filter

Details Flow regulator adaptable for use with process-chamber air filter Flow regulator adaptable for use with process-chamber air filter

1992-03-13

1993-10-26

Hepperle, Stephen M.

Fluid handling

Line condition change responsive valves

With separate connected fluid reactor surface

G05D 701

Patent

active

052557090

ABSTRACT:
A device is provided for regulating the flow of fluid from a source and may be used with an air filter of the type found in clean rooms and the like. The device includes an impeder, movably mounted proximate to the input, for variably impeding fluid flowing from the source, and a movably mounted piston having a distal face, exposed to a reference pressure, such as the pressure of the clean room, and a frontal face, exposed to fluid downstream from the impeder. The impeder and the piston are attached to each other, so that an increase in pressure on the distal face of the piston tends to lessen the impedance on the fluid flow, and an increase in pressure on the frontal face of the piston tends to increase the impedance on the fluid flow. A force is exerted on the impeder and the piston so as to tend to cause the impeder to lessen the impedance on the fluid flow; this force may be the weight of the impeder and the piston, as well as any member that connects them.

REFERENCES:
patent: 3995656 (1976-12-01), Mills

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