Measuring and testing – Volume or rate of flow – Thermal type
Reissue Patent
2007-01-16
2007-01-16
Patel, Harshad (Department: 2855)
Measuring and testing
Volume or rate of flow
Thermal type
Reissue Patent
active
10718511
ABSTRACT:
There is provided a flow rate sensor comprising: a pair of heating resistors operable to heat a sensor tube; a temperature sensor operable to control respective temperatures of the heating resistors; and a case operable to hold the heating resistors and the temperature sensor. The flow rate sensor is adapted to detect a flow rate of a fluid flowing in the sensor tube based on variations of voltages applied to the heating resistors, wherein the variations occur according to the flow rate of the fluid. The flow rate sensor further comprises a voltage applying device operable to arbitrarily set an increase in temperature of each of the heating resistors. The sensor tube has opposite ends thereof thermally connected to the case. The temperature sensor is positioned to be equidistant from the opposite ends of the sensor.
REFERENCES:
patent: 5285673 (1994-02-01), Drexel et al.
patent: 5410912 (1995-05-01), Suzuki
patent: 5741968 (1998-04-01), Arai
patent: 5792952 (1998-08-01), Ritchart
patent: 6125695 (2000-10-01), Alvesteffer et al.
McDermott Will & Emery LLP
MKS Instruments Inc.
Patel Harshad
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