Flow rate detecting element and flow rate sensor using same

Measuring and testing – Volume or rate of flow – Thermal type

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Details

731182, G01F 168

Patent

active

059658118

ABSTRACT:
A flow rate detecting element has a flat substrate 1 provided with a gap opening 18 on at least one side surface, a sensor section 15 including a heating resistance element 4 and a pair of temperature detecting resistance elements 5, 6 arranged on opposite sides of the heating resistance element and wrapped by an insulating supporting film 2 and an insulating protecting film 3 from above and below. The sensor section is arranged on a plane substantially parallel with a surface of the flat substrate and at least one end of the supporting film is held by the flat substrate to locate the sensor section over the gap, whereby the most part of the sensor section is disposed in a non-contact state with the flat substrate. A thin-film-shaped thermal conduction promoting member 11 is provided in a heat transmitting path of the sensor section between the heating resistance element and the pair of temperature detecting resistance elements, and has a higher thermal conductivity than the supporting film and the protecting film.

REFERENCES:
patent: 5060511 (1991-10-01), Sakaue et al.
patent: 5291781 (1994-03-01), Nagata et al.
patent: 5852239 (1998-12-01), Sato et al.

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