Flow rate control device

Details Flow rate control device Flow rate control device

2006-07-04

2006-07-04

Krishnamurthy, Ramesh (Department: 3753)

Fluid handling

Line condition change responsive valves

Pilot or servo controlled

C137S486000, C137S613000, C700S019000, C700S282000

Reexamination Certificate

active

07069944

ABSTRACT:
To control a flow rate ranging from an extremely-low rate to a high rate, particularly, to control an extremely-low flow rate accurately, the following processes are executed. A regulator, a flow rate adjustment valve connected in series downstream of the regulator and adjusting a valve opening of its valve provided to a passage, and a flow rate sensor are provided. A regulator controlled degree and a valve opening controlled degree of the flow rate adjustment are found in accordance with a detection value and a target flow rate value to control the flow rate.

REFERENCES:
patent: 6138708 (2000-10-01), Waldbusser
patent: 1 460 505 (2004-09-01), None
patent: 06324747 (1994-11-01), None
patent: 07-124460 (1995-05-01), None
patent: 09-303609 (1997-11-01), None
patent: 10-161751 (1998-06-01), None

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