Flow manifold for high purity analyzers

Details Flow manifold for high purity analyzers Flow manifold for high purity analyzers

1995-06-15

1997-04-01

Williams, Hezron E.

Measuring and testing

Gas analysis

Moisture content or vapor pressure

7386481, G01N 700

Patent

active

056168276

ABSTRACT:
A flow manifold for high purity analyzers is described, in which all flow control valving is positioned downstream of the measurement device. Specifically, this new flow manifold is applied to a high purity moisture analyzer that utilizes a quartz crystal microbalance detector. The proposed flow design eliminates outgassing and contamination from upstream valving, deadlegs in the flow path, and significantly improves instrument response speed. Experimental data is provided to confirm the performance advantage of the new manifold design over existing designs.

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