Flow instrument with multisensors

Measuring and testing – Volume or rate of flow – Using differential pressure

Reexamination Certificate

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Reexamination Certificate

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06843139

ABSTRACT:
An instrument used to control fluid flow. The instrument has a flow restrictor between an inlet and an outlet. First and second multisensor have sensing surfaces in the inlet and outlet that sense pressures and temperatures of the fluid flow. A circuit generates a mass flow output based on a difference between the pressure in the inlet and the pressure in the outlet. The mass flow output including a temperature correction as a function of at least one of the sensed temperatures in the inlet and outlet.

REFERENCES:
patent: 3792609 (1974-02-01), Blair et al.
patent: 5332005 (1994-07-01), Baan
patent: 5469749 (1995-11-01), Shimada et al.
patent: 5672832 (1997-09-01), Cucci et al.
patent: 6089097 (2000-07-01), Frick et al.
patent: 6119710 (2000-09-01), Brown
patent: 6119730 (2000-09-01), McMillan
patent: 6138990 (2000-10-01), Drexel
patent: 6143080 (2000-11-01), Bartholomew et al.
patent: 6152162 (2000-11-01), Balazy et al.
patent: 6182019 (2001-01-01), Wiklund
patent: 6311568 (2001-11-01), Kleven
patent: 6333272 (2001-12-01), McMillin et al.
patent: 6352001 (2002-03-01), Wickert et al.
patent: 6354150 (2002-03-01), Rudent et al.
patent: 6363958 (2002-04-01), Ollivier
patent: 6592253 (2003-07-01), Nyffenegger et al.
patent: 6609431 (2003-08-01), Tietsworth et al.
patent: 6655207 (2003-12-01), Speldrich et al.
patent: 6742394 (2004-06-01), Stuttaford et al.
patent: 20020046612 (2002-04-01), Mudd
patent: 20040134284 (2004-07-01), Gleeson et al.
patent: 07128103 (1995-05-01), None
patent: 2001-141532 (2001-05-01), None
“High Purity Porous Metal Flow Restrictors,” Mott Corporation High Purity Products, pp. 1-4 from www.mottcorp.com and cover sheet, Jan. 9, 2003.
“High Purity Porous Metal Flow Restrictors, Mott Corporation,” 2 page article and cover sheet, Jan. 9, 2003.
MEMS-Flow, Model 9900 User Manual, Redwood Microsystems Inc., 2001, cover, pp. 2-21 with attached 10 page article dated Apr. 2000.
MEMS-Flow Shut-Off Valve T-Package User Manual, Redwood Microsystems, Inc., 2000, pp. 1-7 and 5 page attachment.
Swagelok Company, May 2002, “VCO Fittings Installation Instructions,” pp. 7 and 9.
FuGasity Corporation, Criterion, “Ultra High Purity Flow Controller,” 4 page article, 2001.
Brooks Instrument, “UHP Models 6950/51 to 6960/61,” Design Specifications, pp. 1-5, May 2000.
Brooks Instrument, “Model 0550E,” Design Specifications, 4 pages article, Aug. 1998.
Brooks Instrument, “Model 6256S,” Design Specification, 8 page article, Oct. 2001.
MKS Technology for Productivity, “Pressure-Based Mass-Flo Controller for Ion Implant Applications Type 1640,” 4 page article, 2001.
MKS Instruments, Vapor Source Mass-Flo Controllers Types 1150C and 1152C, 4 page article, 1999.
Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration for International Application No. PCT/US2004/007321 (filed Mar. 11, 2004): date of mailing Aug.19, 2004.

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