Fluid handling – Systems – Dividing into parallel flow paths with recombining
Patent
1991-02-22
1992-03-31
Hepperle, Stephen M.
Fluid handling
Systems
Dividing into parallel flow paths with recombining
73202, 138 40, 251115, G01F 500
Patent
active
050998811
ABSTRACT:
A flow dividing structure for a mass flow controller includes a base having a main passage which includes an upsream circular passage, a downstream circular passage, and a tapering circular passage which connects the upstream and downstream circular passages. A plug inserted in the main passage includes a first cylindrical portion, a second cylindrical portion and a tapering frustoconical portion. A first annular passage is defined between the first cylindrical portion and the inner circumferential surface of the upstream circular passage. A second annular passage is defined between the second cylindrical portion and the inner circumferential surface of the downstream circular passage. A tapering annular passage is defined between the tapering frustoconical portion and the inner circumferential surface of the tapering circular passage. A flow measuring passage bypasses the tapering circular passage and connects the upstream circular passage with the downstream circular passage.
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Hepperle Stephen M.
Nippon Tylan Corporation
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