Flow controller and its regulation method

Details Flow controller and its regulation method Flow controller and its regulation method

2011-04-05

2011-04-05

Hepperle, Stephen M (Department: 3753)

Fluid handling

Processes

With control of flow by a condition or characteristic of a...

C137S486000, C137S487500, C073S001340, C073S001350, C700S282000

Reexamination Certificate

active

07918238

ABSTRACT:
A mass flow controller arranged to perform mass flow test operation in the controller itself by incorporating a test tank. The mass flow controller is provided, in a channel (6) for feeding fluid, with a means (8) for detecting the mass flow rate of fluid flowing through the channel and outputting a flow rate signal, and a mechanism (10) for controlling the mass flow rate by varying the valve opening by a valve drive signal.

REFERENCES:
patent: 2736337 (1956-02-01), Parks et al.
patent: 5865205 (1999-02-01), Wilmer
patent: 6363958 (2002-04-01), Ollivier
patent: 6450200 (2002-09-01), Ollivier
patent: 6-41759 (1994-02-01), None
patent: 6-119059 (1994-04-01), None
patent: 7-78296 (1995-03-01), None
patent: 7-134052 (1995-05-01), None
patent: 7-281760 (1995-10-01), None
patent: 7-306084 (1995-11-01), None
patent: 8-185229 (1996-07-01), None
patent: 11-45122 (1999-02-01), None
patent: 11-87318 (1999-03-01), None
patent: 11-154022 (1999-06-01), None
patent: 11-223538 (1999-08-01), None
patent: 2004-20306 (2004-01-01), None
English Translation of Written Opinion dated Jan. 11, 2007 from corresponding International Application No. PCT/JP2005/011684.
International Search Report for corresponding PCT Application No. PCT/JP2005/011684, dated Sep. 27, 2005.
Chinese Office Action dated Jun. 20, 2008 from Chinese Application No. 200580000800.2.

Affiliated with

Also associated with

Rating

Flow controller and its regulation method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Flow controller and its regulation method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Flow controller and its regulation method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2733872