Flow control valve utilizing sonic nozzle

Details Flow control valve utilizing sonic nozzle Flow control valve utilizing sonic nozzle

1997-11-28

1999-11-23

Ferensic, Denise L.

Fluid handling

Line condition change responsive valves

Pilot or servo controlled

137486, 25112906, F16K 3112

Patent

active

059882107

ABSTRACT:
A flow control valve for a semiconductor manufacturing process, which valve utilizes a pressure sensor between the flow control valve and a subsequent sonic nozzle to detect the gas pressure which is fed back to the valve to control the flow through the valve.

REFERENCES:
patent: 4146051 (1979-03-01), Sparks
patent: 4399836 (1983-08-01), De Versterre et al.
patent: 4641683 (1987-02-01), Murner
patent: 4836233 (1989-06-01), Milgate, III
patent: 5029610 (1991-07-01), Hiratsuka et al.
patent: 5033496 (1991-07-01), Reid
patent: 5460202 (1995-10-01), Hanley et al.
patent: 5669408 (1997-09-01), Nishino et al.

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