Valves and valve actuation – Hermetic flexible wall seal for actuator – Diaphragm
Patent
1999-03-25
2000-10-31
Shaver, Kevin
Valves and valve actuation
Hermetic flexible wall seal for actuator
Diaphragm
251318, F16K 3100
Patent
active
061389900
ABSTRACT:
A fluid valve assembly including a ball valve within a central hole in a resilient disc-shaped spring. The spring has additional openings to minimize resistance to fluid flow from inlet to outlet. Clearance between the spring and side walls of the cavity within which it is mounted allows the ball to center itself in its seat. The central hole diameter, ball diameter and separation between the spring and seat are selected to create an upward force on the ball over its entire stroke which provides a frictional force between the spring and a supporting lip to minimize radial motion of the spring to keep the ball aligned. The force also overcomes the weight of the ball in applications where the inlet pressure is very low, and also overcomes adhesion of the ball to the seat. The assembly is incorporated in a mass flow controller typically used with semiconductor fabrication processes.
REFERENCES:
patent: 4558587 (1985-12-01), Fruzzetti
patent: 4852605 (1989-08-01), Gouhier
patent: 4911405 (1990-03-01), Weissgerber
patent: 5046701 (1991-09-01), Barber
patent: 5165655 (1992-11-01), Drexel
patent: 5617894 (1997-04-01), Wolff
patent: 5785297 (1998-07-01), Ha
patent: 5850850 (1998-12-01), Mudd
DXL USA Inc.
Gray Edward
Shaver Kevin
Welsh John P.
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