Fluid handling – With indicator – register – recorder – alarm or inspection means – Fluid pressure responsive indicator – recorder or alarm
Patent
1990-02-14
1991-07-09
Rosenthal, Arnold
Fluid handling
With indicator, register, recorder, alarm or inspection means
Fluid pressure responsive indicator, recorder or alarm
25112906, F16K 3104
Patent
active
050296108
ABSTRACT:
A flow-control type piezoelectric element valve simplifies calibration of the gas flow rate, permits stable control of the gas flow rate and facilitates to supply a gas at stable flow rate. A gap is produced between a valve seat and a sealing portion comprising a sheet arranged on the top of the valve seat and a piezoelectric element, by applying from a current installation element to the piezoelectric element. Then a gas is introduced into a gas channel within the valve seat through the gap, pressure of the gas flowing along the gas channel is detected by means of a pressure sensor mounted near the outlet of the gas channel. According to correlation between pressure and gas flow rate in the output characteristics on the pressure sensor, the flow rate at the time when a gas flows along the gas channel can be accurately and easily calculated.
REFERENCES:
patent: 4617952 (1986-10-01), Fujiwara et al.
Hiratsuka Hajime
Kawasaki Kozo
Miyo Yasuhiko
Japan Atomic Energy Research Institute
Rosenthal Arnold
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