Flow-control type piezoelectric element valve

Fluid handling – With indicator – register – recorder – alarm or inspection means – Fluid pressure responsive indicator – recorder or alarm

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25112906, F16K 3104

Patent

active

050296108

ABSTRACT:
A flow-control type piezoelectric element valve simplifies calibration of the gas flow rate, permits stable control of the gas flow rate and facilitates to supply a gas at stable flow rate. A gap is produced between a valve seat and a sealing portion comprising a sheet arranged on the top of the valve seat and a piezoelectric element, by applying from a current installation element to the piezoelectric element. Then a gas is introduced into a gas channel within the valve seat through the gap, pressure of the gas flowing along the gas channel is detected by means of a pressure sensor mounted near the outlet of the gas channel. According to correlation between pressure and gas flow rate in the output characteristics on the pressure sensor, the flow rate at the time when a gas flows along the gas channel can be accurately and easily calculated.

REFERENCES:
patent: 4617952 (1986-10-01), Fujiwara et al.

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