Flow control of photo-polymerizable resin

Details Flow control of photo-polymerizable resin Flow control of photo-polymerizable resin

2011-04-26

2011-04-26

Coleman, W. David (Department: 2823)

Semiconductor device manufacturing: process

Miscellaneous

C430S298000

Reexamination Certificate

active

07932190

ABSTRACT:
This invention provides methods and systems, e.g., to control the flow of photo-polymerizable resins. In the method, e.g., flow of a photo-polymerizable resin is restricted from illuminated resin exclusion regions on a substrate surface by precisely situated flow barriers. A system to control photo-polymerizable resin flow includes, e.g., a light source, a mask and a substrate.

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