Fluid handling – Systems – Dividing into parallel flow paths with recombining
Patent
1993-04-28
1995-06-06
Nilson, Robert G.
Fluid handling
Systems
Dividing into parallel flow paths with recombining
137486, 1374875, G05D 706
Patent
active
054213657
ABSTRACT:
A flow control apparatus comprises a base body, first and second gas passages provided in the base body for passing gas therethrough, gas flow adjusting mechanism, provided so as to connect the first and second gas passages to each other, for adjusting the flow of gas passing therethrough, and gas flow control unit for outputting a flow control signal to the gas flow adjusting mechanism so as to control the flow of gas passing through the first or second gas passage. In the base body, a bypass passage is formed in the base body for connecting the first and second gas passages to each other, and a valve mechanism is employed for opening and closing the bypass passage. When a trouble has occurred, the valve mechanism is opened, and a purging gas is supplied through the bypass passage to purge a flammable or noxious gas. Thereafter, the gas flow control apparatus is removed and repaired.
REFERENCES:
patent: 3217731 (1965-11-01), Swanson
patent: 4197874 (1980-04-01), Neff
patent: 4374785 (1983-02-01), Wyatt
patent: 4917535 (1990-04-01), Prassas
patent: 5056554 (1991-10-01), White
Matsuo Takenobu
Moriya Shuji
Wakabayashi Tsuyoshi
Nilson Robert G.
Tokyo Electron Limited
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