Floating zone drawing circuitry for semiconductor rods

Details Floating zone drawing circuitry for semiconductor rods Floating zone drawing circuitry for semiconductor rods

1989-03-13

1990-02-13

Leung, Philip H.

Electric heating

Metal heating

Of cylinders

219 1043, 373139, H05B 608

Patent

active

049008870

ABSTRACT:
For floating zone drawing of semiconductor rods having diameters greater than 100 mm, at the beginning of the zone drawing process, in particular during melting on of the seed crystal to the semiconductor rod to be drawn, a high load change and impedance change occurs. The power from the high-frequency (HF) generator is no longer coupled thereto optimally. Heating up the feed line to the induction heating coil is the result. This heating is avoided by connecting the HF generator via a feed line to a tank circuit device. A variable tank circuit capacitor connected in parallel and to the series oscillator circuit coil feeding one side of a parallel circuit of a heating circuit capacitor and the induction heating coil. The variable oscillator circuit capacitor is adjusted as a function of the voltage drop across the induction heating coil.

REFERENCES:
patent: 2964608 (1960-12-01), MacLean
patent: 3046379 (1962-07-01), Keller et al.
patent: 3270177 (1966-08-01), Prediger et al.
patent: 3718852 (1973-02-01), Bailey
patent: 3985947 (1976-10-01), Keller
patent: 4356371 (1982-10-01), Kiuchi et al.
patent: 4392230 (1983-07-01), Keller et al.

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