Floating-type substrate conveying and processing apparatus

Details Floating-type substrate conveying and processing apparatus Floating-type substrate conveying and processing apparatus

2011-03-15

2011-03-15

Edwards, Laura (Department: 1713)

Coating apparatus

Projection or spray type

C118S305000, C118S500000, C198S689100, C198S493000, C198S817000, C406S086000, C406S088000, C414S676000

Reexamination Certificate

active

07905195

ABSTRACT:
The present invention provides a floating-type substrate conveying and processing apparatus that floats a substrate to be processed. The device includes a floating stage that floats the substrate, a liquid supplier placed above the floating stage via the substrate to supply a process liquid to a surface of the substrate, and a moving mechanism for holding the substrate as detachable at opposite ends of the substrate, at a floating height of the substrate, and for moving the substrate on the floating stage. The floating stage is formed of a porous member and has a plurality of suction apertures airtightly defined in a porous portion of the porous member. The floating stage injects gas through the porous portion and sucks gas through the suction apertures to float the substrate placed on the porous portion.

REFERENCES:
patent: 5177878 (1993-01-01), Visser
patent: 5492566 (1996-02-01), Sumnitsch
patent: 7604439 (2009-10-01), Yassour et al.
patent: 7648579 (2010-01-01), Goodman et al.
patent: 10-156255 (1998-06-01), None
patent: 2004-273574 (2004-09-01), None
patent: 2005-52821 (2005-03-01), None
patent: 2005-132626 (2005-05-01), None
patent: 2005-244155 (2005-09-01), None

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