Floating head slider and method of manufacturing the same

Details Floating head slider and method of manufacturing the same Floating head slider and method of manufacturing the same

1995-06-06

1996-10-22

Chea, Thorl

Etching a substrate: processes

Forming or treating article containing magnetically...

216 27, 216 56, 360113, G11B 5127

Patent

active

055673317

ABSTRACT:
A floating head slider having an air bearing surface is manufactured by forming a read/write element over the top surface of a rail forming substrate and over the sidewall of a groove formed into the rail forming substrate. A flattening film is formed over the read/write element to planarize the structure, and a slider base substrate is stacked over the flattening film. Parallel rails are formed on the bottom of the rail forming substrate by etching a flat recess into the bottom of the rail forming substrate, thereby forming the air bearing surface. A signal line is connected to the read/write element by filling a hole in the slider base substrate and the flattening film with a conductive material. The rail forming substrate and the slider base substrate are cut along the side surface of the groove to expose the portion of the read/write element formed on the side surface of the groove, and the rail forming surface is polished to form a front gap portion of the read/write element.

REFERENCES:
patent: 4066312 (1978-01-01), Faure
patent: 5068759 (1991-11-01), Matsuzaki
patent: 5166845 (1992-11-01), Thompson et al.
patent: 5175658 (1992-12-01), Chang et al.
patent: 5187623 (1993-02-01), Ibaraki
patent: 5270895 (1993-12-01), Ruigrok et al.
J. P. Lazzari and P. Deroux-Dauphin, "A New Thin Film Head Generation IC Head", IEEE Transactions On Magnetics, vol. 25, No. 5, Sept. 1989, PP. 3190-3193.
H. Hamilton, R. Anderson and K. Goodson, "Contact Perpendicular Recording on Rigid Media", IEEE Transactions on Magnetics, vol. 27, No. 5, Nov. 1991, pp. 4921-4926.

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