Static information storage and retrieval – Magnetic bubbles – Guide structure
Patent
1988-11-10
1991-06-11
Hille, Rolf
Static information storage and retrieval
Magnetic bubbles
Guide structure
357 50, 357 45, 365185, H01L 2968, H01L 2704, H01L 2710
Patent
active
050236806
ABSTRACT:
A contact-free floating-gate non-volatile memory cell array and process with silicided NSAG bitlines and with source/drain regions buried beneath relatively thick silicon oxide. The bitlines have a relatively small resistance, eliminating the need for parallel metallic conductors with numerous bitline contacts. The array has relatively small bitline capacitance and may be constructed having relatively small dimensions. Isolation between wordlines and between bitlines is by thick field oxide regions. A thick field oxide strip separates each ground conductor/bitline pair. Wordlines may be formed from silicided polycrystalline or other material with low resistivity. Coupling of programming and erasing voltages to the floating gate is improved by extending the gates over the thick field oxide and perhaps by using an insulator with relatively high dielectric constant between the control gate and the floating gate. The four sides of the floating gates are defined with a single patterning step. The resulting structure is a dense cross-point array of programmable memory cells.
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Gill Manzur
Tigelaar Howard L.
Demond Thomas W.
Hille Rolf
Limanek Robert P.
Lindgren Theodore D.
Sharp Melvin
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