Flip-chip pressure transducer

Details Flip-chip pressure transducer Flip-chip pressure transducer

1985-04-08

1988-08-09

Grimley, A. T.

Electrical resistors

Strain gauge type

Fluid- or gas pressure-actuated

29 2535, 296211, 73727, 338 42, G01L 906

Patent

active

047630981

ABSTRACT:
Disclosed is a pressure transducer comprising a pressure sensitive silicon die having a front side exposing piezoresistive means and comprising means for flip-chip mounting the die to a pressure vessel. The transducer further comprises a pressure vessel having an aperture, the pressure vessel comprising means for flip-chip mounting the die over the aperture. The die is flip-chip mounted over the aperture in the pressure vessel, and there is a hermetic seal between the pressure vessel and the die.

REFERENCES:
patent: 3790870 (1974-02-01), Mitchell
patent: 4079508 (1978-03-01), Nunn
patent: 4080696 (1978-03-01), Shimatsu
patent: 4121334 (1978-10-01), Wallis
patent: 4208782 (1980-06-01), Kurtz et al.
patent: 4216404 (1980-08-01), Kurtz et al.
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patent: 4589287 (1986-05-01), Dickens
patent: 4665754 (1987-05-01), Glenn et al.
Allan, Roger; "New Applications Open Up for Silicon Sensors: A Special Report"; Electronics, Nov. 6, 1980, pp. 113-122.

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