Flight state detection apparatus of micro object and flight...

Details Flight state detection apparatus of micro object and flight... Flight state detection apparatus of micro object and flight...

2006-05-31

2009-11-10

Budd, Mark (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S322000

Reexamination Certificate

active

07615911

ABSTRACT:
Disclosed herein is a flight state detection apparatus and a flight state detection method that is capable of accurately detecting the flight state of a micro object ejected from a micro object ejection part. The flight state detection apparatus is constructed in a simplified structure and is manufactured at low costs. The flight state detection apparatus includes a sensor substrate, a piezoelectric/electrostrictive element, and an aperture plate. The sensor substrate includes a thick support part and a vibrating plate supported by the thick support part in a cantilever shape. The piezoelectric/electrostrictive element is mounted to a fixed end side of the vibrating plate. In the aperture plate, an aperture is formed, which is opposite to a target part disposed at a free end side of the vibrating plate. When the micro object passes through the aperture, and then collides with the target part, the vibrating plate is vibrated, and an electromotive force corresponding to the vibration state is generated in the piezoelectric/electrostrictive element.

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