Flexureless multi-stable micromirrors for optical switching

Details Flexureless multi-stable micromirrors for optical switching Flexureless multi-stable micromirrors for optical switching

1999-01-25

2000-03-21

Phan, James

Optical: systems and elements

Deflection using a moving element

Using a periodically moving element

359223, 359224, 359871, G02B 2608

Patent

active

060409355

ABSTRACT:
An array of micromirror devices is fabricated using standard surface-micromachining techniques such that the reflective mirror surfaces are anchored by a trapped joint rather than by rigid support flexures. These devices are therefore multi-stable in actuation rather than continuous like typical micromirror devices in which the restoring spring force of the flexures is used to balance the force of electrostatic actuation. As a result, the flexureless micromirror can be actuated to specific stable positions that make it ideal for optical switching. Since no direct mechanical connection is required to support the mirror surfaces, these devices can be switched between stable positions in binary fashion and at higher speeds.

REFERENCES:
M. A. Michalicek, J. H. Comtois, and H. K. Schriner, "Design and fabrication of optical MEMS using a four-level, planarized, surface-micromachined polysilicon5 process," Proc. SPIE, vol. 3276, pp. 48-55, 1998.

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