Geometrical instruments – Gauge – Work support adjustment
Patent
1984-02-21
1985-12-24
Haroian, Harry N.
Geometrical instruments
Gauge
Work support adjustment
33 1M, 350531, G01B 500
Patent
active
045597170
ABSTRACT:
An improved flexure hinge permits both angular pivoting and longitudinal expansion and contraction and is made of a body member of solid material which is normally not flexible or expandable. A first recess is defined part-way through the body member at one longitudinally extending edge opposite second and third recesses defined through the opposite longitudinally-extending edge of the body member. The first recess is separated from each of the second and third recesses by web-like portions which are sufficiently thin to permit flexure of the body member about respective first and second axes extending through the first and second web portions, respectively. A stage, moveable along a single axis, employs four such body members, each body member having two double web hinge devices, one double web device being located at each end of the body member. The four body members are disposed symmetrically about the axis along which the stage is moved, and symmetrically about a transverse axis. The body members extend to the stage member from a surrounding frame.
REFERENCES:
patent: 4320943 (1982-03-01), Link
IBM Tech. Bull., "Frictionless X,Y,Z Table" by Aronstein et al., vol. 15, . 12, 5/73.
IBM Tec. Bul., "Step & Repeat Micro Table", vol. 12, #11, 4/70.
Scire Fredric E.
Teague E. Clayton
Edell Ira C.
Englert Alvin J.
Haroian Harry N.
Pawlikowski Eugene J.
The United States of America as represented by the Secretary of
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