Flexure-beam actuator and stage for micro- and nano-positioning

Details Flexure-beam actuator and stage for micro- and nano-positioning Flexure-beam actuator and stage for micro- and nano-positioning

2006-10-10

2006-10-10

Raevis, Robert (Department: 2856)

Measuring and testing

Surface and cutting edge testing

Roughness

C074S470000

Reexamination Certificate

active

07117724

ABSTRACT:
This invention enables high-resolution, high-precision motion control at low cost. A novel flexure-beam motion-reducing actuator is incorporated into an XYØ positioning stage to enable rigidly stable positioning of any object with sub-10-nanometer linear-positioning precision and sub-0.1-microradian rotary-positioning precision. The actuator's output element moves in the same direction as its input element. A single actuator enhances the resolution and precision of any motion-control drive mechanism by a factor as much as 50 or more, and a cascaded pair of actuators provide enhancement factors greater than 1000. In one embodiment, the enhancement factor is adjustable manually. The actuator and stage are useful for optical, lithographic and scanning probe applications.

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J. G. Goodberlet and Bryan L. Dunn, Microelectronic Eng., vol. 53, p. 95 (2000), p. 98, c. 1+2 FIG. 3.
T. Bailey, et al, Journal of Vacuum Science and Technology B, vol. 18, p. 3572 (Dec. 2000), p. 3576, c. 1 I.3-14.
Martin L. Culpepper and Gordon Anderson, “Design of a low-cost nano-manipulator which utilizes a monolithic, spatial compliant mechanism”, submitted to the Journal of Precision Engineering, also available at http://www.mit.edu, no date, p. 3, FIG. 3; p. 4, FIG. 4; p. 6, FIG. 6.

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