Flexural plate wave sensor and array

Details Flexural plate wave sensor and array Flexural plate wave sensor and array

2007-09-11

2007-09-11

Chapman, John E. (Department: 2856)

Measuring and testing

Gas analysis

By vibration

C073S061750, C073S580000, C422S069000

Reexamination Certificate

active

11357911

ABSTRACT:
A method for manufacturing a flexural plate wave sensor includes the steps of depositing an etch-stop layer over a substrate, depositing a membrane layer over the etch stop layer, depositing a piezoelectric layer over the membrane layer, forming a transducer on the piezoelectric layer, etching a cavity through the substrate, the cavity having substantially parallel interior walls, and removing the portion of the etch stop layer between the cavity and the membrane layer to expose a portion of the membrane layer.

REFERENCES:
patent: 5836203 (1998-11-01), Martin et al.

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