Flexural plate wave sensor and array

Details Flexural plate wave sensor and array Flexural plate wave sensor and array

2006-02-21

2006-02-21

Chapman, John E. (Department: 2856)

Measuring and testing

Gas analysis

By vibration

C073S061750, C073S580000, C422S069000

Reexamination Certificate

active

07000453

ABSTRACT:
A flexural plate wave sensor array includes a substrate, and a plurality of flexural plate wave sensors, each sensor including a cavity formed in the substrate, a thin film membrane layer spanning the cavity, a piezoelectric layer disposed on the thin film membrane layer, a transducer disposed on the piezoelectric layer and an absorptive coating disposed on said thin film membrane layer within the cavity. The cavity of each of the sensors includes interior walls which are substantially parallel to each other and to the interior walls of adjacent sensors.

REFERENCES:
patent: 5836203 (1998-11-01), Martin et al.

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