Flexural plate wave sensor and array

Details Flexural plate wave sensor and array Flexural plate wave sensor and array

2005-02-08

2005-02-08

Chapman, John E. (Department: 2856)

Measuring and testing

Gas analysis

By vibration

C073S061750, C422S069000, C438S049000

Reexamination Certificate

active

06851297

ABSTRACT:
A method for manufacturing a flexural plate wave sensor includes the steps of depositing an etch-stop layer over a substrate, depositing a membrane layer over the etch stop layer, depositing a piezoelectric layer over the membrane layer, forming a first transducer on the piezoelectric layer and forming a second transducer on the piezoelectric layer, spaced from the first transducer. The method further includes the steps of etching a cavity through the substrate, the cavity having substantially parallel interior walls, removing the portion of the etch stop layer between the cavity and the membrane layer to expose a portion of the membrane layer, and depositing an absorptive coating on the exposed portion of the membrane layer.

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