Flexible wire grid polarizer and fabricating method thereof

Details Flexible wire grid polarizer and fabricating method thereof Flexible wire grid polarizer and fabricating method thereof

2006-09-12

2006-09-12

Dunn, Drew A. (Department: 2872)

Optical: systems and elements

Polarization without modulation

Polarization variation over surface of the medium

C359S900000, C216S024000, C264S001310

Reexamination Certificate

active

07106507

ABSTRACT:
The present invention provides a flexible wire grid polarizer used in a visible ray band and a fabricating method thereof. The present invention includes the steps of forming a non-adhesive layer on an inner area of a lower substrate, forming a flexible polymer substrate on the lower substrate including the non-adhesive layer, forming a thin metal layer on the flexible polymer substrate, forming a metal grid pattern by etching the thin metal layer, dicing a wafer staying within a boundary of the non-adhesive layer on the lower substrate, and separating the lower substrate including the non-adhesive layer from the diced wafer to complete the flexible wire grid polarizer.

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