Flexible vacuum pick-up device

Details Flexible vacuum pick-up device Flexible vacuum pick-up device

1996-12-12

1998-05-05

Kramer, Dean

Handling: hand and hoist-line implements

Utilizing fluid pressure

Venturi effect

29743, B25J 1506

Patent

active

057464626

ABSTRACT:
The present invention discloses a flexible vacuum pick-up device for use in wafer processing that includes a handle portion adapted for holding by a human hand, the handle portion has a passage therein for fluid communication, a flexible conduit for providing a connection between the handle portion and a pick-up head and for providing a vacuum passage therethrough, and a vacuum pick-up head that has an extended planar surface adapted for making intimate contact with a substantially flat wafer.

REFERENCES:
patent: 2922873 (1960-01-01), Bibbero et al.
patent: 2983541 (1961-05-01), Maki
patent: 4767142 (1988-08-01), Takahashi et al.
patent: 5203241 (1993-04-01), Mattis
patent: 5290082 (1994-03-01), Palmer et al.
Western Electric Technical Digest No. 27, Jul. 1972.

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